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Título: Micromachining of PMN-PT Crystals with Ultrashort Laser Pulses
Autores: Piredda, Giovanni
Stroj, Sandra
Ziss, Dorian
Stangl, Julian
Trotta, Rinaldo
Martín-Sánchez, Javier
Rastelli, Armando
Palabras Claves: Física
Fecha Edición: 21-Feb-2019
Editor: Springer
Cita Bibliográfica: Giovanni Piredda, Sandra Stroj, Dorian Ziss, Julian Stangl, Rinaldo Trotta, Javier Martín-Sánchez, Armando Rastelli. Micromachining of PMN-PT Crystals with Ultrashort Laser Pulses. Appl. Phys. A. 2019; 125: 201
Resumen: Lead–magnesium niobate lead titanate (PMN-PT) has been proven as an excellent material for sensing and actuating applications. The fabrication of advanced ultra-small PMN-PT-based devices relies on the availability of sophisticated procedures for the micro-machining of PMN-PT thin films or bulk substrates. Approaches reported up to date include chemical etching, excimer laser ablation, and ion milling. To ensure an excellent device performance, a key mandatory feature for a micro-machining process is to preserve as far as possible the crystalline quality of the substrates; in other words, the fabrication method must induce a low density of cracks and other kind of defects. In this work, we demonstrate a relatively fast procedure for the fabrication of high-quality PMN-PT micro-machined actuators employing green femtosecond laser pulses. The fabricated devices feature the absence of extended cracks and well-defined edges with relatively low roughness, which is advantageous for the further integration of nanomaterials onto the piezoelectric actuators.
Aparece en las Colecciones:Física
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